TiAlSiN涂层刀具研究新进展

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To meet the ever growing industrial demand of an enhanced performance, quaternary TiAlN based on thin films has been developed. Among them, incorporation of Si into the TiAlN coating attracts extensive attention due to the combination of super-hard effect and improved thermal stability. The development process of TiAlSiN coating,the mechanism and effect of Si element in TiAlSiN coating, the TiAlSiN coating preparation methods and the development trend of TiAlN coating tools are introduced.在TiAlN涂层中添加第四组元素以提高涂层的力学性能和热稳定性已成为目前刀具涂层的前沿领域。而在这些多元涂层中,Si能显著改进（Ti,Al）N涂层的抗氧化性、热稳定性和硬度,因而引起了研究人员的极大兴趣和关注。对TiAlSiN涂层的发展过程、Si在TiAlSiN涂层中的作用、TiAlSiN涂层的制备方法以及其发展趋势做了系统介绍。